发明名称 Integrated circuit`s manufacturing parameter testing device e.g. build-in-self test structure, for analyzing eventual variation, has ring oscillators providing frequencies, and measurement block providing counting results to shaping circuit
摘要 The device has a set of ring oscillators (60-1 - 60-n) which provides oscillation frequencies (f1 - fn). A measurement block (70) provides counting results (C-1 - C-n) representing current values of the frequencies and has counters (71-1 - 71-n) whose number is equal to that of the oscillators. The counting results are provided to a shaping circuit (72), for producing a set of bits representing the results to be provided to an output terminal (56) of the device, from a master counter (73) receiving a clock frequency (CLK) from a terminal (55) of the device. An independent claim is also included for a method for testing manufacturing parameters of an integrated circuit.
申请公布号 FR2900278(A1) 申请公布日期 2007.10.26
申请号 FR20060051391 申请日期 2006.04.20
申请人 STMICROELECTRONICS ROUSSET SAS SOCIETE PAR ACTIONS SIMPLIFIEE;UNIVERSITE D'AIX MARSEILLE I 发明人 DREUX PHILIPPE;MERCIER OLIVIER
分类号 H01L21/66;G01R31/303 主分类号 H01L21/66
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