| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing non-linear device for eliminating fluctuation in element characteristics of a non-linear element utilizing a side surface of an lower electrode as an element, and also to provide an electro-optical apparatus. SOLUTION: For manufacture of a non-linear device, a first insulating film 17 composed of a tantalum oxide is formed in the thickness, for example, of about 50 to 150 nm on the upper surface of the lower electrode 13 with the mask sputtering method in the first insulating film forming step ST103, after formation of the lower electrode 13 composed of tantalum film of island state in the thickness of about 100 to 150 nm with the mask sputtering method in the lower electrode forming step ST102. Next, in the second insulating film forming step ST104, after the formation of the second insulating film 14 thinner than the first insulating film 17 on the side surface 132 of the lower electrode 13, upper electrodes 15a, 15b are formed with the gas phase oxidation method. COPYRIGHT: (C)2007,JPO&INPIT
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