| 摘要 |
PROBLEM TO BE SOLVED: To prevent collision by estimating the collision of a measuring target moved across measuring points with an X-ray measuring optical system. SOLUTION: This X-ray inspection device 1 is equipped with a stage 14 for placing the measuring target S so that the measuring target is positioned between an X-ray source 11 and an X-ray detector 12 and a drive mechanism 15 to perform X-ray inspection with respect to a plurality of the measuring points of the measuring target placed on the stage and equipped with three-dimensional shape extraction part 36 for extracting the three-dimensional shape of the measuring target on the basis of the image of an optical camera, a measuring point data input part 37 for receiving the input of the position data related to the measuring points, a passage range extraction part 38 for extracting the passing range of the measuring target during movement when the measuring target is moved between the measuring points through the shortest route, a collision judging part 41 for judging collision possibility on the basis of the positional relation of the X-ray measuring optical system with the passing range of the measuring target and an avoidance route calculation part 42 for calculating an avoidance route in a case that there is collision possibility. COPYRIGHT: (C)2007,JPO&INPIT
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