| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting an object including an image sensor constituted to receive a structural light reflected from an object surface. SOLUTION: This method 38 of inspecting the object 12 includes the emission 40 of light from at least one out of a liquid crystal display (LCD) device and a LCOS (liquid crystal on silicon) device, the phase shift 42 of the light emitted from at least one of the LCD device and the LCOS device, the projection 44 of the phase-shifted light onto a surface of the object, the reception 46 of light reflected from the object surface using the imaging sensor 24, and the analysis 50 for the light received by the imaging sensor to facilitate inspection for at least one part of the object. COPYRIGHT: (C)2007,JPO&INPIT
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