发明名称 Trench mosfet
摘要 The invention relates to a trench MOSFET with drain ( 8 ), dpi ft region ( 10 ) body (12) and source ( 14 ). In order to improve the figure of mepit for use of the MOSFET as control and sync FETs, the trench ( 20 ) is partially filled with dielectric ( 24 ) adjacent to the drift region ( 10 ) and a graded doping profile is used in the dpift region ( 10 )
申请公布号 US2007108515(A1) 申请公布日期 2007.05.17
申请号 US20040580619 申请日期 2004.11.26
申请人 KONINKLIJKE PHILIPS ELECTRONICS, N.V. 发明人 HUETING RAYMOND J.;HIJZEN ERWIN A.
分类号 H01L29/94;H01L29/06;H01L29/08;H01L29/423;H01L29/78 主分类号 H01L29/94
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