发明名称 |
Polishing apparatus and method of polishing work |
摘要 |
The method of polishing a work is capable of reducing a polishing cost, polishing a surface of the work with high polishing accuracy and easily disposing used polishing liquid and used washing liquid. The method comprises the steps of: pressing the work onto a polishing member; feeding polishing liquid; and relatively moving the work with respect to the polishing member. Electrolytic reduced water produced by electrolyzing an electrolyte solution is used as the polishing liquid.
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申请公布号 |
US2007108067(A1) |
申请公布日期 |
2007.05.17 |
申请号 |
US20060598789 |
申请日期 |
2006.11.14 |
申请人 |
FUJIKOSHI MACHINERY CORP. |
发明人 |
SATO UNKAI;ICHIKAWA KOICHIRO;NISHIMOTO YOSHINOBU;NAKAMURA YOSHIO;HASEGAWA TSUYOSHI;IIHAMA MASUMI |
分类号 |
B23H5/00;B24B37/00;B24B55/02;B24B57/02;H01L21/304 |
主分类号 |
B23H5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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