| 摘要 |
In a vibration sensor for outputting, as vibration signals, variations of capacitance between a fixed electrode and a diaphragm 3 electrode opposed thereto, the diaphragm electrode 3 has slits 3 a formed in the same plate member to define a diaphragm portion 3 b positioned centrally to be vibrated and displace only by gravity, a fixed portion 3 c positioned peripherally, and elastic support portions 3 d for connecting the diaphragm portion 3 b to the fixed portion 3 c.
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