发明名称 Laser beam processing machine
摘要 A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, the laser beam application means comprising a laser beam oscillation means for oscillating a laser beam and a condenser for converging the laser beam oscillated by the laser beam oscillation means, wherein the condenser comprises a first cylindrical lens unit having a first cylindrical lens, a second cylindrical lens unit having a second cylindrical lens which is positioned such that its converging direction becomes perpendicular to the converging direction of the first cylindrical lens, and an interval adjustment mechanism for adjusting the interval between the first cylindrical lens unit and the second cylindrical lens unit.
申请公布号 US2007109526(A1) 申请公布日期 2007.05.17
申请号 US20060593045 申请日期 2006.11.06
申请人 DISCO CORPORATION 发明人 MORIKAZU HIROSHI;TSUCHIYA TOSHIO;ENDO TOMOAKI;TAKEYAMA KOICHI
分类号 G03B27/02;G03B27/04 主分类号 G03B27/02
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