| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact polishing device capable of effectively removing unnecessary membranes or scars in the periphery or back portions of substrates through polishing. SOLUTION: The device is equipped with a supply reel 52 wound with a polishing tape 51 with polishing face, a winding reel 53 for taking up the polishing tape 51, pressing members 59a, 59b, and 59c, designed to press the polishing tape 51 onto the polishing target face of the substrate W between the supply reel 52 and the winding reel 53, and a motor 61, designed to revolve the winding reel 53. A polishing cartridge 5 stores the supply reel 52, winding reel 53, and pressing members 59a, 59b, and 59c, and a cartridge holding portion 6 holds a polishing cartridge 5 in a detachable manner. COPYRIGHT: (C)2007,JPO&INPIT |
