摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator having a good displacement characteristic and its manufacturing method, and also to provide an ink jet head. <P>SOLUTION: This piezoelectric actuator 2 displaces a surface displacement element 6 and displacement element 5 concurrently, and is provided with an ink jet head 20. This actuator stacks sequentially, a common electrode 23, a piezoelectric ceramics layer 24, and a drive electrode 25 on a piezoelectric vibration plate 22, and a number of drive electrodes 25 are aligned on the surface of the piezoelectric ceramics layer 24 so that the drive electrode 25 and the common electrode 23 can pinch the piezoelectric ceramics layer 24 to form a number of displacement elements 5. A piezoelectric body 26 and a surface common electrode 27 are sequentially stacked on each drive electrode 25, and the piezolectric body 26 are pinched by the drive electride 25 and the surface common electrode 27 to form a number of surface displacement elements 6. <P>COPYRIGHT: (C)2007,JPO&INPIT |