发明名称 DRIVING APPARATUS AND DRIVING METHOD, POSITION DETECTING APPARATUS AND ALIGNER USING IT, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To prevent the heat generation in a driving system in a driving apparatus by a simple means. <P>SOLUTION: The driving apparatus has a driving mechanism having a motor and a current supplying means for supplying an exciting current to the exciting winding of the motor. Further, the apparatus is provided with a means for detecting the exciting current for the motor or the current supplied to the driving mechanism, and a means for determining whether the detected current exceeds a first predetermined value and a second predetermined value larger than the first one respectively. The exciting current is limited or the apparatus is stopped in accordance with the detected current value. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007123686(A) 申请公布日期 2007.05.17
申请号 JP20050316234 申请日期 2005.10.31
申请人 CANON INC 发明人 OSAKABE YUICHI
分类号 H01L21/027;G01B11/00;G03F7/20 主分类号 H01L21/027
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