| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an excitation distortion actuator that can eliminate the thermal expansion deformation of an excitation distortion element caused by the Joule heat of a coil generated at operating the excitation distortion actuator, and heat generation caused by an eddy current loss of the excitation distortion element, can drive a movable member and a fixed member in a manner of non-contact between them, is smooth in operation mode, and is improved in responsiveness. <P>SOLUTION: The actuator includes: a displacement generation means composed of the excitation distortion element 2 and a movable shaft 7; a magnetic field application means composed of the coil 3 that applies a magnetic field to the displacement generation means, a coil bobbin 4, and permanent magnets 5; a casing 1 that accommodates the displacement generation means and the magnetic field application means; and a magnetic circuit mechanism constituted of at least part of the casing together with the displacement generation means. An annular gap 10 is formed between the actuator and the casing 1 that surrounds the movable shaft 7, and a fluid hole that opens toward the annular gap 10 is formed at the casing, thus forming a fluid bearing. <P>COPYRIGHT: (C)2007,JPO&INPIT |
