| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of industrially, safely and continuously with good yield, producing nitrogen trifluoride (NF<SB>3</SB>) by a direct fluorination method of reacting NH<SB>3</SB>gas with F<SB>2</SB>gas. <P>SOLUTION: This method for production of nitrogen trifluoride comprises: feeding both fluorine and ammonia gases into a tubular reactor to react in a gaseous phase in the presence of a diluting gas without using a catalyst; generating a gaseous product mainly comprising nitrogen trifluoride and a solid product consisting mainly of ammonium fluoride and/or its acidic one; and removing the solid product adhered to the inner walls of the tubular reactor and/or piping by heat-treating in the presence of an inert gas. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
