METHOD OF FORMING ORGANIC SEMICONDUCTOR FILM AND ORGANIC THIN FILM SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an organic semiconductor superior in performance and easily forming an organic semiconductor film by a wet process which improves the wettability of a coating liquid of an organic semiconductor material with a substrate. SOLUTION: The semiconductor film forming method supplies a coating liquid containing an organic semiconductor material to a substrate to form the film. The method comprises a pre-step of supplying an organic solvent to the substrate prior to supplying the coating liquid containing the organic semiconductor material to the substrate. COPYRIGHT: (C)2007,JPO&INPIT