摘要 |
PROBLEM TO BE SOLVED: To provide a laser device where harmful gas which occurs in a cabinet and deteriorates an optical component can be removed with a simple structure, and to provide a method of operating the laser device. SOLUTION: The laser device is provided with a laser oscillator radiating a laser beam and the cabinet incorporating the laser oscillator. A photocatalyst is installed in a part in the cabinet where scattered light or partial reflected light of the laser beam is irradiated from the laser oscillator. When TiO<SB>2</SB>is used as the photocatalyst, harmful gas is decomposed to a harmless level by mainly irradiating ultraviolet light of 380 nm or less. COPYRIGHT: (C)2007,JPO&INPIT
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