| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a driving stage device for highly precisely controlling the temperature of a movable section. <P>SOLUTION: A driving stage device 1 is provided with a base plate 2; a stage 3 moving on the upper surface of the base plate 2; a driving part 4 for driving the stage 3; a heat transferring means 5 for transferring heat between the base plate 2 and the stage 3; and a control means 6 for controlling the temperature of the stage 3. The control means 6 uses the proportionality coefficients of heat conduction functions preliminarily calculated on the basis of actual measurement in order to make the heat conduction functions approximate to heat radiation functions for obtaining heat to be transferred according to heat radiation in a determined use temperature range, so that the heat conduction functions including the proportionality coefficients can be made to approximate to the heat radiation functions. Thus, it is possible to substitute the heat radiation functions proportional to the 4th power of an absolute temperature with heat conduction functions proportional to temperature, and to control the temperature of a movable section with high precision. <P>COPYRIGHT: (C)2007,JPO&INPIT |
