| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a projected body which can form it simply and in a smaller number of processes. <P>SOLUTION: The projected body is manufactured by the first step of forming a resist film on a surface of a substrate; the second step of changing a relative distance between the resist film and an exposure mask, while exposing a surface of the resist film through the exposure mask; and the third step of developing the resist film and of removing the resist film partially, thereby forming the projected body having a predetermined shape. <P>COPYRIGHT: (C)2007,JPO&INPIT |
