| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fall detector which protects a transferred object when it falls, and at the same time detects the fall of the transferred object, and to provide an exposure apparatus equipped with the fall detector. <P>SOLUTION: The fall detector comprises mesh-like members 51, 59, 65, 67, and 69 arranged on the under side of a transfer path of transferring means 17 and 45 for transferring the transferred object 45, and a plurality of vibration detecting means 53, which are arranged in the mesh-like members 51, 59, 65, 67 and 69 to detect the vibration of the mesh-like members 51, 59, 65, 67, and 69. The vibration detecting means 53 are arranged at intervals in the mesh-like members 51, 59, 65, 67, and 69. The fall detector also includes a fall position deducing means for deducing the position of fall of the transferred object 45, based on the signals from the plurality of vibration detecting means 53. <P>COPYRIGHT: (C)2007,JPO&INPIT |
