| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent an apparatus from increasing its size also when transmitting electric power and control signals or the like to a moving member. <P>SOLUTION: The exposure apparatus comprises pieces of first apparatuses 100a, 100b and a second apparatus 20 that can travel relatively mutually, and the pieces of first apparatuses 100a, 100b perform processing related to exposure by using electric power and control signals or the like. The exposure apparatus comprises a transmitter T2 for transmitting electric power and control signals or the like between the first apparatus and the second one without any contact when the first apparatus and the second one are in a prescribed position relationship, and stopping transmission of the electric power and control signals or the like between the first apparatus and the second one when the first apparatus and the second one are no longer in a prescribed position relationship. The first apparatus performs processing related to exposure only when it is in a prescribed position relationship with the second apparatus. <P>COPYRIGHT: (C)2007,JPO&INPIT |
