MOLECULAR BEAM EPITAXIAL APPARATUS, CONTROLLER THEREOF, CONTROL METHOD THEREOF, CONTROL PROGRAM THEREFOR, AND COMPUTER READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a controller of a molecular beam epitaxial apparatus which improves the working rate of the molecular beam epitaxial apparatus provided with a plurality of molecular beam cells having the same molecular beam material and realizing high reproducibility in film formation. SOLUTION: The controller 118 of the molecular beam epitaxial apparatus 100 comprises: a residual amount calculator 405 for obtaining the residual amount of the molecular beam material 105 inside each molecular beam cell 107, for the plurality of molecular beam cells 107 having the same molecular beam material 105; a predicted time consumption calculator 406 for calculating the predicted time consumption of the molecular beam material 105 remaining in each molecular beam cell 107, after the film formation of the next time for the ones of the respective molecular beam cells 107 for which setting is changed, while keeping the total consumption of the same molecular beam material 105 in respective layers in the film formation of the next time equal; and a cell setting decision part 407 for deciding the setting in each molecular beam cell 107 in the film formation of the next time, so as to reduce the difference of the predicted time consumption. COPYRIGHT: (C)2007,JPO&INPIT