| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring device and a thickness measuring method for measuring film thickness accurately with a simple constitution. SOLUTION: A film thickness measurement result measured by a film thickness sensor 12 is corrected, based on a comparison result between a distance difference based on a measurement result of each distance from each surface of a plurality of standard members 14A, 14B having each different thickness inserted so as to be placed on a measuring object member 18 placed on a reference member 16 to the surface of the reference member 16, and a distance difference from each surface of the plurality of standard members 14A, 14B to the surface of the reference member 16 measured beforehand under a specific environmental condition by the thickness measuring device 10. COPYRIGHT: (C)2007,JPO&INPIT
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