| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing process of a surface-fluorinated substrate by which a fluorination reaction is conducted efficiently at a high enough reaction rate commercially and economically. SOLUTION: The manufacturing process of the surface-fluorinated substrate involves a step in which a substrate composed of a compound having a C-H bond and an inert liquid are put in a reaction vessel and the substrate is immersed in the inert liquid and a step in which fluorine is dissolved in the inert liquid by introducing not less than 20 volume% of a gas containing fluorine in the reaction vessel to fluorinate the surface of the immersed portion of the substrate. COPYRIGHT: (C)2007,JPO&INPIT
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