发明名称 Concurrent control of semiconductor parametric testing
摘要 An automated semiconductor parametric test system has a control module that is operable to concurrently control both operation of semiconductor test equipment and operation of parametric test instrumentation. A state oscillator module is controlled by the control module, and further may be operated by the control module in some embodiments to control the state of other system modules in synchronization with other system events. A parametric test equipment module facilitates control of the semiconductor parametric test equipment, and a test instrumentation module facilitates control of the parametric test instrumentation.
申请公布号 US2007112538(A1) 申请公布日期 2007.05.17
申请号 US20070651139 申请日期 2007.01.09
申请人 MICRON TECHNOLOGY, INC. 发明人 VELICHKO SERGEY A.;BLUNN ROBERT G.;DOROUGH MICHAEL J.
分类号 G01R31/00;G01R31/28;G01R31/30;G06F11/24 主分类号 G01R31/00
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