| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a hard film which has higher hardness and more excellent oxidation resistance than an (AlCr)N-based film or an (AlCrSi)N-based film, stably shows excellent abrasion resistance and cohesion strength even in an environment in which thermal stress works, and has enhanced strength and toughness at high temperatures, and to provide a tool coated with the hard film. <P>SOLUTION: The hard film is coated on a substrate surface, and has at least one layer which is made from one or more compounds selected from a nitride, a carbide, a boride, an oxide and a sulfide of (Al<SB>1-x-y-z</SB>Nb<SB>x</SB>Cr<SB>y</SB>Si<SB>z</SB>) or a solid solution thereof, wherein x, y and z represent an atomic ratio of the elements respectively, and satisfy the expressions of 0.04<x<0.40, 0.06<y<0.40, 0≤z<0.20 and 0.10<x+y+z<0.50 respectively. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
