发明名称 WORK-WASHING METHOD AND WORK-WASHING SYSTEM
摘要 PROBLEM TO BE SOLVED: To efficiently wash work to be washed with dry ice and prevent dew from forming on the work. SOLUTION: Firstly, the spaces of a washing room 1 and back room 3 are filled with low water-content carbon dioxide gas with a vacuum pump 12 and a carbon dioxide injection device 13 to put the rooms in a low dew point environment. Secondly, after work 20 is thrown into a front room 2, the front room 2 is also put in a low dew point environment (a pre-washing process). Thirdly, the work 20 in the front room 2 is moved to the washing room 1 and then washed with powered dry ice jetting out from a washing nozzle 16 (a washing process). At that time, pre-washing to the subsequent work 20 is made in the front room 2. Fourthly, the washed work 20 is moved to the back room 3, warmed with a heater 22, and then carried out. Then, the back room 3 is put again in the low dew point environment (a post-washing process). At that time, washing to the subsequent work 20 is made in the washing room 1. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007117838(A) 申请公布日期 2007.05.17
申请号 JP20050311325 申请日期 2005.10.26
申请人 ASAHI SUNAC CORP 发明人 YAMAMOTO HIROYUKI;HIGUCHI TAKUYA
分类号 B08B7/00;H01L21/304 主分类号 B08B7/00
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