| 摘要 |
In gates, a gate length is same as that of an isolated Poly on a layout, however, is different from that of the isolated Poly on an actual silicon wafer. When the distance between the gates that is spacing between the gate becomes larger to some degree, the proximity effect is lost and the proximity Poly becomes same as the isolated Poly. In this way, because the correlation with another macro-cell arranged adjacent differs when the distance between the gates differs, the correlation coefficient varies. Therefore, correlation is grouped according to the distance between the gates.
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