发明名称 |
Thin film transistor array panel and method of manufacturing the same |
摘要 |
In one embodiment, a thin film transistor array display panel and method of manufacturing the same are provided. A method includes forming a gate line on a substrate; forming a gate insulating layer, a semiconductor layer, and an ohmic contact layer on the gate line; forming a data layer on the ohmic contact layer; forming a photosensitive pattern on the data layer; etching the data layer to form a data line including a source electrode and a drain electrode that is opposite to the source electrode; reflowing the photosensitive pattern to cover side surfaces of the source electrode and the drain electrode; and etching the ohmic contact layer using the reflowed photosensitive pattern as a mask. |
申请公布号 |
US2007111412(A1) |
申请公布日期 |
2007.05.17 |
申请号 |
US20060600481 |
申请日期 |
2006.11.15 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
OH MIN-SEOK;PARK JEONG-MIN;KIM SANG-GAB;CHIN HONG-KEE;JEONG CHANG-OH;PARK HONG-SICK;KIM SHI-YUL |
分类号 |
H01L21/84 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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