| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film device ensuring operating performance by ensuring the adhesion properties of a conductive film and the magnetic characteristics of a magnetic film. SOLUTION: The surface roughness (arithmetic mean roughness Ra) of a substrate 1 is within the range of Xμm≤Ra≤0.1μm. A lower limit X of this surface roughness Ra is a value determined on the basis of a series of parameters including an internal stressσ, a thickness T and an adhesion P per unit length of a conductive film 2. An anchor effect is used to ensure the adhesion properties of the conductive film 2, and magnetic characteristics (magnetic permeability) is ensured, even when the substrate 1 having an uneven surface structure is provided with a magnetic film 3. COPYRIGHT: (C)2007,JPO&INPIT |
