| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing system which can reduce its occupation area and has versatality. SOLUTION: A carry-in/out device monitors the operation condition of a manufacturing apparatus provided for every step, and changes over an interface between the carry-in/out apparatus and the manufacturing apparatus, to either of a carry-in mode where a material or an intermediate product is carried in to the manufacturing apparatus from the carry-in/out apparatus, and a carry-out mode where a material or an intermediate product is carried out from the manufacturing apparatus to the carry-in/out apparatus, according to the operation condition of the manufacturing apparatus. COPYRIGHT: (C)2007,JPO&INPIT
|
