| 摘要 |
PROBLEM TO BE SOLVED: To facilitate change of working distance and measuring range, and to secure a measurement accuracy even after the change. SOLUTION: In a sensor head 1, parallel light or approximate parallel light is generated by a pair of condensing lenses 7a and 7b reciprocating according to vibration of a collimate lens 6 and tuning fork 8, and is emitted through a light port 11. A lens holder 12 supporting an objective lens 12 is detachably attached to the light port 11. Light coming out of the light port 11 is processed into a measurement beam BM condensed by the objective lens 12 at a predetermined position. COPYRIGHT: (C)2007,JPO&INPIT
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