发明名称 Laterally double-diffused metal oxide semiconductor transistor and method for fabricating the same
摘要 The present invention discloses a laterally double-diffused metal oxide semiconductor transistor (LDMOS) and a method for fabricating the same. The LDMOS includes a substrate, a first well, a drain, a second well and a source. The substrate includes a first conductive dopant. The first well includes a second conductive dopant and formed in a part of the substrate, and the drain is located in the first well. The second well includes the first conductive dopant and formed in another part of the substrate, and the source located in the second well. The source includes a lightly doped region and a heavily doped region extending downwardly from a top surface of the substrate. The depth of the lightly doped region is more than the depth of the heavily doped region.
申请公布号 US2007108520(A1) 申请公布日期 2007.05.17
申请号 US20060399427 申请日期 2006.04.07
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LIN CHENG-CHI;SU SHIN;CHU CHIEN-WEN;LIEN SHIH-CHIN;YEH CHIN-PEN
分类号 H01L29/76;H01L29/94;H01L31/00 主分类号 H01L29/76
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