发明名称 Gallium nitride-based compound semiconductor light-emitting device and negative electrode thereof
摘要 An object of the present invention is to provide a negative electrode which attains excellent Ohmic contact with an n-type gallium nitride-based compound semiconductor layer and which resists deterioration in characteristics which would be caused by heating. Another object of the invention is to provide a gallium nitride-based compound semiconductor light-emitting device having the negative electrode. The inventive gallium nitride-based compound semiconductor light-emitting device comprises an n-type semiconductor layer of a gallium nitride-based compound semiconductor, a light-emitting layer of a gallium nitride-based compound semiconductor and a p-type semiconductor layer of a gallium nitride-based compound semiconductor formed on a substrate in this order, and has a negative electrode and a positive electrode provided on the n-type semiconductor layer and the p-type semiconductor layer, respectively; wherein the negative electrode comprises a bonding pad layer and a contact metal layer which is in contact with the n-type semiconductor layer, and the contact metal layer is composed of Cr or a Cr alloy and formed through sputtering.
申请公布号 US2007108458(A1) 申请公布日期 2007.05.17
申请号 US20040581751 申请日期 2004.12.08
申请人 SHOWA DENKO K.K. 发明人 KAMEI KOJI
分类号 H01L21/28;H01L21/285;H01L33/32;H01L33/40 主分类号 H01L21/28
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