COMPOUND AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a compound which can be used for resist compositions, and to provide a method for producing the compound.

SOLUTION: The compound represented by the general formula (I) [R is an acid-dissociable dissolution-inhibiting group; R11to R17are each an alkyl group or the like; (g)+(j)+(k)+(q)≤5; (b)+(l)+(m)≤4; (c)+(n)+(o)≤4; A is a group represented by formula (Ia) or (Ib) or an alicyclic group].

COPYRIGHT: (C)2007,JPO&INPIT