| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device having a position detection system without possibility of saved space and disconnection of a connection cable. <P>SOLUTION: The stage device 50 is provided with a base 59, moving tables 52 and 54 which can move in a prescribed direction with respect to the base 59; linear scales 81 which are installed in the base 59 and are arranged in a prescribed direction; reading heads 82 which are arranged in the moving tables 52 and 54, and are disposed opposite to the linear scales 81 to read the linear scales 81; power supply devices 71 arranged along the linear scales 81; power receiving devices 76 which are installed in the moving tables 52 and 54, and receive power used for an operation of the reading heads 82 from the power supply devices 71 without contact; and a control unit controlling positioning of the moving stages 52 and 54, based on reading information that the reading heads 82 read from the linear scales 81. <P>COPYRIGHT: (C)2007,JPO&INPIT |
