| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reliable photoelectric converter capable of suppressing a curl of a substrate. <P>SOLUTION: A film deposition apparatus comprises a first conveyance chamber having a roller for delivering a substrate, a film deposition chamber having a discharge electrode, a buffer chamber installed between the conveyance chamber and the film deposition chamber, or between the film deposition chambers, a slit formed in a part through which the substrate in the buffer chamber is conveyed, and a second conveyance chamber having a roller for winding the substrate. At least one touch roll is installed in the slit, and the touch roller is brought into contact with a film deposition surface of the substrate. A film deposition method and a photoelectric converter manufacturing method are performed by using the film deposition apparatus. By using the film deposition method, damages of a photo-sensing area of an element can be prevented. <P>COPYRIGHT: (C)2007,JPO&INPIT |
