PROCESSING METHOD OF LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide a processing method of a laminate capable of simply cutting/dividing the laminate even if the materials of the substrates which constitute the laminate are different.

SOLUTION: In the processing method of the laminate P, the laminate P is constituted of a plurality of substrates and composed of a substrate P1 being a first substrate and a substrate P2 being the second substrate laminated on the substrate P1. This processing method of the laminate P is equipped with a process for irradiating the substrate P1 with a laser beam 5 to form a material modified part 7 and a process for applying stress F to the laminate P to form divided pieces Q.

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