发明名称 |
Alignment Film, Method of Forming the Same, and Liquid Crystal Display Including the Same |
摘要 |
A method of forming the alignment film includes placing an inorganic target and a substrate in a chamber so that the inorganic target and the substrate are parallel to each other, evacuating the chamber to a first pressure, supplying a discharge gas into the chamber and evacuating the chamber to a second pressure higher than the first pressure. Moreover, the method further includes depositing an inorganic film on the substrate by ejecting inorganic particles from the inorganic target.
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申请公布号 |
US2007110922(A1) |
申请公布日期 |
2007.05.17 |
申请号 |
US20060557554 |
申请日期 |
2006.11.08 |
申请人 |
RHO SOON-JOON;PARK KYONG-OK;KIM JANG-SUB;JEON BAEK-KYUN;SON PHIL-KOOK;KIM JAE-CHANG;YOON TAE-HOON;SEO JOO-HONG;CHA SUNG-SU;LEE SUNG-PIL |
发明人 |
RHO SOON-JOON;PARK KYONG-OK;KIM JANG-SUB;JEON BAEK-KYUN;SON PHIL-KOOK;KIM JAE-CHANG;YOON TAE-HOON;SEO JOO-HONG;CHA SUNG-SU;LEE SUNG-PIL |
分类号 |
C09K19/00;G02F1/1337 |
主分类号 |
C09K19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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