发明名称 Flash memories and methods of fabricating the same
摘要 The present disclosure relates to a flash memory including a common source line having a predetermined width formed on a semiconductor substrate, a common source in the semiconductor substrate below the common source line, and a couple of floating gates having a predetermined width formed on both outer side walls of the common source line. The flash memory may also include a couple of tunneling oxide layers formed between the floating gate and the common source line, and between the floating gate and the semiconductor substrate, a couple of dielectric layers formed on each of the couple of floating gates, and a couple of control gates formed on each of the couple of dielectric layers. Further, the flash memory may include a couple of drains formed in the semiconductor substrate by injecting impurity ions in using the control gate and the common source line as a mask.
申请公布号 US2007111445(A1) 申请公布日期 2007.05.17
申请号 US20070650216 申请日期 2007.01.03
申请人 KOH KWAN-JU 发明人 KOH KWAN-JU
分类号 H01L21/336;G11C16/04;H01L21/8247;H01L27/115 主分类号 H01L21/336
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