| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device whose temperature is sufficiently adjusted by restricting the use of cables and the like. <P>SOLUTION: The exposure device EX is provided with a temperature adjusting system 30 which has a receiver receiving power and is driven by received power, and with a supplier for supplying power to the receiver in a non-contact state with the receiver. <P>COPYRIGHT: (C)2007,JPO&INPIT |
