| 摘要 |
PROBLEM TO BE SOLVED: To enable anyone to easily analyze a device which operates in a multitask system. SOLUTION: Log information 670 which records an operation of a substrate processor to be analyzed in a text format is preliminarily acquired and stored in a storage device 22. Reception record (command reception record) of a command to be communicated among a plurality of tasks is extracted from the log information 670 by executing a program 1 by a CPU 21. Character strings representing the command, a transmission task and a reception task are extracted from the extracted command reception record and each of them is converted into a character string (display name) which is easily understood by an operator. Furthermore, a command sequence diagram is drawn based on the character strings after conversion and displayed on a display 3. COPYRIGHT: (C)2007,JPO&INPIT
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