发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR MODULE AND WIRING BOARD
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor module with which a semiconductor chip can be bonded to a wiring board in a simple mounting process. SOLUTION: In the manufacturing method of the semiconductor module 100, the semiconductor chip 70 having a cathode electrode 60 and an anode electrode 54 is bonded to the wiring board having a first wiring part 12 and a second wiring 14 with wireless bonding. The method comprises (a) a process for arranging the reference position of the semiconductor chip 70 on the reference position of the wiring board, for bonding the cathode electrode 60 to the second wiring 14 and the anode electrode 54 to the first wiring 12; and (b) a process for irradiating laser spots 80, 82 and 84 arranged in a line with laser beams, bonding the cathode electrode 60 to the second wiring 14, and bonding the anode electrode 54 to the first wiring 12 in the first wiring 12 and the second wiring 14. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007123340(A) 申请公布日期 2007.05.17
申请号 JP20050309878 申请日期 2005.10.25
申请人 SEIKO EPSON CORP 发明人 NAGASAKA KIMIO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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