| 摘要 |
PROBLEM TO BE SOLVED: To stably produce an electrophotographic photoreceptor without sacrificing its electrical properties at a reduced production cost in a high yield. SOLUTION: A plurality of cylindrical substrates 107 are arranged at equal intervals on one and the same circumference in a reaction vessel 100. A gaseous starting material is introduced from gaseous starting material introduction tubes 106 into the reaction vessel 100, and high frequency electric power is fed from a high frequency power source 109 via a discharge electrode, so as to crack the gaseous starting material, thus a deposited film is formed on the cylindrical substrates 107. During the film formation, a non-film formation gas which does not contribute to the film formation is introduced from a non-film formation gas introduction tube 111 arranged in a space surrounded by the gaseous starting material introduction tubes 106. COPYRIGHT: (C)2007,JPO&INPIT
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