| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method of FOUP (front opening unified pod) cleaning and drying which can eliminate contamination of FOUP due to a metal. SOLUTION: This FOUP cleaning drying apparatus is provided with a door shell cleaning rinse tank 1 for cleaning a door shell with a chemical liquid and rinse it with pure water; a door shell dewatering tank 2 for dewatering the door shell; door shell drying tank 3 for drying the door shell; a pod shell cleaning tank 4 for cleaning a pod shell with a chemical liquid and rinsing it with water; a pod shell dewatering tank 5 for dewatering the pod shell; and a pod shell drying tank 6 for drying the pod shell. COPYRIGHT: (C)2007,JPO&INPIT |
