| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozonizer which has such a high precision discharge space that the discharge gap length is <0.1 mm and can generate a high concentration ozone gas. SOLUTION: The ozonizer is equipped with: parallel flat plate type ground electrode 2 and high voltage electrode 3; dielectric plates 4, 5 arranged to face to the ground electrode 2 and to be brought into contact with the high voltage electrode 3; and an electrode module 17 having the ground electrode 2 and spacers 7 defining the gap length between with the dielectric plates 4, 5. In the ozonizer, a gas containing oxygen is supplied to a discharge space formed by the ground electrode 2 and the dielectric plates 4, 5, and the oxygen is converted into ozone by the discharge generated in the discharge space. The dielectric plates 4, 5 are dielectrics obtained by firing a first green sheet on one surface of which the high voltage electrode 3 is formed. The spacers 7 are conductive bodies formed on the other surface of the first green sheet or ceramics obtained by the firing of projected parts which are formed by processing the other surface of the first green sheet to an uneven state, and are bonded to the ground electrode 2. COPYRIGHT: (C)2007,JPO&INPIT
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