| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method of a substrate which prevents foreign substances from being generated, and to provide a manufacturing method of a liquid jetting head. SOLUTION: A metal layer 124 is formed over the whole faces of the substrate 130 where a through-hole 35 penetrating in the thickness direction is formed. Thereafter, while a protecting sheet 200 where an exposure hole 201 communicating with the through-hole 35 is formed in a region opposed to the through-hole 35, is attached to one face of the substrate 130, the metal layer 124 of the other face of the substrate 130 and in the through-hole 35 is removed by wet etching. COPYRIGHT: (C)2007,JPO&INPIT
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