| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linear motor that can precisely obtain a positional relationship between a coil and a magnet even if rotation (yawing) is generated around a central axis at acceleration/deceleration, can easily be adapted to a stage device mounted with a counter mass, does not generate vibration caused by a thrust error even if the linear motor is driven at large acceleration, and can perform high-accuracy positioning; and to provide the stage device, a phase correction method of the linear motor, an exposure device, and a device manufacturing method. <P>SOLUTION: The linear motor comprises a multi-phase coil unit and a magnet unit; and also comprises a position detection means that detects positions of the multi-phase coil unit and the magnet unit, and a correction means that corrects the phase of a current imparted to the multi-phase coil on the basis of an output of the position detection means. There are provided the stage device using the linear motor, the phase correction method of the linear motor, the exposure device using the stage device, and the device manufacturing method using the exposure device. <P>COPYRIGHT: (C)2007,JPO&INPIT |
