| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source device equipped with a high voltage pulse generator unit capable of generating an electric current wave shape capable of maintaining a heating state of plasma. <P>SOLUTION: A pair of main discharge electrodes of the extreme ultraviolet light source device are connected as a load L of the high voltage pulse generator unit 20. Capacitors C21, C22 and C23 are charged through a magnetic switch SR2, by turning a solid state switch SW on. Then, a magnetic switch SR3 is turned on, and electric charges of the capacitors C21 through C23 are discharged through coils L1 through L3 and the load respectively. By setting parameters of each series circuit of the coils L1 through L3 and the capacitors C1 through C3 different, a wave shape of electric current flowing within the load L has inflexion points (folding points). Therefore, the heating stage of the plasma can be maintained and output energy of EUV light can be increased by adjusting the electric current to increase at a stage in which the plasma is pinched by increasing the electric current at the inflexion point. <P>COPYRIGHT: (C)2007,JPO&INPIT |
