| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an active damping device effectively suppressing resonance of structures, in an exposure device in which local characteristic vibration may be generated in various types of structures on a considerable level with respect to high requirements in device performance, and perticularly in the exposure device with complicated structure, it is difficult to mechanically suppress a characteristic vibration mode for each part of the structures. <P>SOLUTION: At least one physical quantity out of positions, velocities, and accelerations of two structures mounted on a vibration-free base 8 is detected, and the characteristic vibration of an object to be damped is suppressed by an actuator 4 acting between one structure and the other structure which is rigidly connected, and a compensating computing element 6 driving the actuator based on the detected physical quantity. <P>COPYRIGHT: (C)2007,JPO&INPIT |
