| 摘要 |
PROBLEM TO BE SOLVED: To suppress the transmission of compounded vibration as micro-vibration from a driving source to a rack member, in addition to vibration due to an inertial force in the case of acceleration/deceleration during conveyance, to a container such as an FOUP or the like to be conveyed by a driving means such as a suspended pattern elevating conveyance carrier, which is equipped with the rack member by which a plurality of substrates such as wafers are supported so as to be freely inserted/extracted; and to prevent the damage of a substrate to be supported by the rack member. SOLUTION: An FOUP main body 3a and a rack member 3e installed in the FOUP main body 3a are configured as different bodies, an elastic body 3g is interposed between the FOUP main body 3a and the rack member 3e, and the rack member 3e is configured so as to be elastically supported by the FOUP main body 3a. COPYRIGHT: (C)2007,JPO&INPIT |
