| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic substrate and a bonding structure of an electrical connector for power supplies which can hold high bonding strength and good electrical connection for a long period. SOLUTION: The ceramic substrate and the bonding structure of an electrical connector for power supplies include: a spot-faced hole 4 formed in a ceramic substrate 2 so as to expose a part of an RF electrode 3; the protrusion 5a of the shape compatible with the shape of the small diameter of the spot-faced hole 4; an insertion member 5 for stress relaxation provided in the spot-faced hole 4, in the state where the protrusion 5a is inserted into the small diameter; and a wax material 6 which bonds an electric feeder bar 8 and the insertion member for stress relaxation 5, and seals the clearance between the spot-faced hole 4 and the insertion member for stress relaxation 5. COPYRIGHT: (C)2007,JPO&INPIT |
